Semiconductor 15 megaohm ultra pure water equipment

 

Preparation process of semiconductor material ultra pure water equipment:

1. Pretreatment → reverse osmosis → intermediate water tank → water pump → EDI device → pure water tank → pure water pump → ultraviolet sterilizer → 0.2 or 0.5 μ m precision filter → water point (≥ 15m Ω. Cm) (new process)

2. Pretreatment system → reverse osmosis system → intermediate water tank → pure water pump → coarse mixing bed → fine mixing bed → ultraviolet sterilizer → precision filter → water point (≥ 15m Ω. Cm) (traditional process)